Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483146 | Electrostatic chuck heater | Natsuki HIRATA, Shinya Hasegawa | 2019-11-19 |
| 10388560 | Shaft-end mounting structure | — | 2019-08-20 |
| 10332774 | Wafer support structure | — | 2019-06-25 |
| 10292209 | Electrostatic chuck heater | — | 2019-05-14 |
| D846513 | Sheet heater for electrostatic chuck | Rishun Kin | 2019-04-23 |
| 10256105 | Disc-shaped heater and heater-cooling-plate assembly | Kengo Torii | 2019-04-09 |
| D843334 | Flexible printed circuits | Rishun Kin | 2019-03-19 |