Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10340120 | Blanking aperture array, method for manufacturing blanking aperture array, and multi-charged particle beam writing apparatus | — | 2019-07-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10340120 | Blanking aperture array, method for manufacturing blanking aperture array, and multi-charged particle beam writing apparatus | — | 2019-07-02 |