Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10234370 | Particle size measuring method and device | Haruhisa Kato, Naoko Oouchi | 2019-03-19 |
| 10222293 | Optical characteristic measuring method, optical characteristic adjusting method, exposure apparatus, exposing method, and exposure apparatus manufacturing method by detecting a light amount of measuring light | Hiroshi Ooki | 2019-03-05 |