Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418962 | System and method for resonator amplitude control | — | 2019-09-17 |
| 10322927 | Microelectromechanical device and method for manufacturing it | Matti Mantysalo | 2019-06-18 |
| 10317669 | Micro-optical electromechanical device and method for manufacturing it | — | 2019-06-11 |