Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438829 | Purge device and purge method | Masanao Murata | 2019-10-08 |
| 10410894 | Purge stocker and purging method | Shinji Onishi, Masanao Murata | 2019-09-10 |
| 10325794 | Purge device and purge method | Masanao Murata | 2019-06-18 |
| 10239101 | Purge device and method of diffusing gas including purge gas | Masanao Murata, Mitsuya Tokumoto | 2019-03-26 |
| 10217656 | Purge apparatus and purge method | Masanao Murata | 2019-02-26 |