Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395895 | Feedback control by RF waveform tailoring for ion energy distribution | David J. Coumou, Yuriy Elner, Daniel M. Gill, Richard Pham | 2019-08-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395895 | Feedback control by RF waveform tailoring for ion energy distribution | David J. Coumou, Yuriy Elner, Daniel M. Gill, Richard Pham | 2019-08-27 |