Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10396601 | Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamber | Ky Thoai Luu | 2019-08-27 |
| 10229816 | Solid-state impedance matching systems including a hybrid tuning network with a switchable coarse tuning network and a varactor fine tuning network | David J. Coumou, Dennis M. Brown, Mariusz Oldziej, Yogendra K. Chawla, Daniel J. Lincoln | 2019-03-12 |
| 10217609 | Adaptive periodic waveform controller | Larry J. Fisk, II, Jonathon W. Smyka | 2019-02-26 |