Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10508362 | Substrate mounting member, wafer plate, and SiC epitaxial substrate manufacturing method | Hiroaki Sumitani | 2019-12-17 |
| 10370775 | Silicon carbide epitaxial wafer manufacturing method, silicon carbide semiconductor device manufacturing method and silicon carbide epitaxial wafer manufacturing apparatus | Akihito Ohno, Takashi Kanazawa | 2019-08-06 |
| 10229830 | Method of manufacturing silicon carbide epitaxial wafer | Ryo Hattori, Takuyo Nakamura | 2019-03-12 |