Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10409946 | Process artefact compensation upon transfer of a mask layout onto a mask substrate | Christoph Sambale | 2019-09-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10409946 | Process artefact compensation upon transfer of a mask layout onto a mask substrate | Christoph Sambale | 2019-09-10 |