Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10315337 | Methods and system for controlling a surface profile of a wafer | Peter Albrecht, Sumeet S. Bhagavat, Vandan Tanna, Uwe Hermes | 2019-06-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10315337 | Methods and system for controlling a surface profile of a wafer | Peter Albrecht, Sumeet S. Bhagavat, Vandan Tanna, Uwe Hermes | 2019-06-11 |