Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10431469 | Method for high aspect ratio photoresist removal in pure reducing plasma | Li Diao, Robert George Elliston, David Gilbert, Chan-Yun Lee, James Paris +2 more | 2019-10-01 |
| 10217626 | Surface treatment of substrates using passivation layers | Tongchuan Gao, Grigoriy Kishko, Michael X. Yang | 2019-02-26 |