Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10312060 | Plasma generating apparatus using mutual inductive coupling and substrate treating apparatus comprising the same | Hee-Sun Chae, Jeong-hee Cho, Han Saem Rhee, Hyun Jun Kim | 2019-06-04 |