Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10319088 | Inspection apparatus of EUV mask and its focus adjustment method | Hiroki MIYAI | 2019-06-11 |
| 10305246 | Iodine laser based defense system | — | 2019-05-28 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10319088 | Inspection apparatus of EUV mask and its focus adjustment method | Hiroki MIYAI | 2019-06-11 |
| 10305246 | Iodine laser based defense system | — | 2019-05-28 |