Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483010 | Reduction of surface and embedded substrate charge by controlled exposure to vacuum ultraviolet (VUV) light in low-oxygen environment | Rafal Dylewicz, Reinhold SCHWARZENBACHER, Xia Man, Kenichi Sano, David Lou | 2019-11-19 |