Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10214807 | Atomic layer deposition of tungsten for enhanced fill and reduced substrate attack | Joshua Collins, Siew Neo, Hanna Bamnolker | 2019-02-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10214807 | Atomic layer deposition of tungsten for enhanced fill and reduced substrate attack | Joshua Collins, Siew Neo, Hanna Bamnolker | 2019-02-26 |