Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388485 | Inter-electrode gap variation methods for compensating deposition non-uniformity | — | 2019-08-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388485 | Inter-electrode gap variation methods for compensating deposition non-uniformity | — | 2019-08-20 |