Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10401944 | Power control during releasing operation | Taketoshi Hayashi | 2019-09-03 |
| 10170284 | Plasma processing method and plasma processing apparatus | Kenta Yasuda, Takashi Kondo, Katsuhiro Ishida | 2019-01-01 |