Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10466602 | Patterning method, lithography apparatus, and article manufacturing method | Taichi Yoshioka, Tohru Suzuki, Moritaka Iwakoshi, Taizou Kawada, Hironori Okazumi +2 more | 2019-11-05 |