Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10508336 | Substrate processing apparatus | Takayuki Nakada, Takashi Nogami, Daigi KAMIMURA | 2019-12-17 |
| 10403528 | Substrate-processing apparatus and method of manufacturing semiconductor device | Yasuaki Komae, Takashi Nogami, Shigeru Odake | 2019-09-03 |