Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D862404 | Sealing material ring for a semiconductor manufacturing apparatus | Shinya Morita, Masashi Suzuki | 2019-10-08 |
| 10351951 | Substrate treatment apparatus including reaction tube with opened lower end, furnace opening member, and flange configured to cover upper surface of the furnace opening member | Keishin Yamazaki, Shinya Morita | 2019-07-16 |