Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460966 | Encapsulated instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications | Mei Sun, Jing Zhou, Ran Liu | 2019-10-29 |
| 10215626 | Method and system for measuring radiation and temperature exposure of wafers along a fabrication process line | Mei Sun, Kevin O'Brien | 2019-02-26 |