Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497536 | Apparatus and method for correcting arrayed astigmatism in a multi-column scanning electron microscopy system | — | 2019-12-03 |
| 10338013 | Position feedback for multi-beam particle detector | Christopher Sears | 2019-07-02 |
| 10242839 | Reduced Coulomb interactions in a multi-beam column | — | 2019-03-26 |