Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10409303 | Temperature controller of semiconductor wafer and temperature control method of semiconductor wafer | — | 2019-09-10 |
| 10332764 | Temperature controller of semiconductor wafer and temperature control method of semiconductor wafer | — | 2019-06-25 |
| 10325788 | Temperature controller of semiconductor wafer and temperature control method of semiconductor wafer | — | 2019-06-18 |