Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483143 | End effector and substrate conveying robot | Yasuhiko Hashimoto, Takayuki Fukushima, Shinya Kinoshita, Daiki Miyagawa | 2019-11-19 |
| 10354899 | Wafer transfer method and wafer transfer device | Takayuki Fukushima | 2019-07-16 |