Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10381257 | Substrate conveying robot and substrate processing system with pair of blade members arranged in position out of vertical direction | Mark TANG, Shigeki Ono, Shinya Kitano, Ming Zeng, Hirohiko Goto | 2019-08-13 |