Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10435808 | Etching apparatus used for photo electrochemical etching of semiconductor substrate | Yumi Saito, Teruhisa Akashi, Kenji Nakashima | 2019-10-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10435808 | Etching apparatus used for photo electrochemical etching of semiconductor substrate | Yumi Saito, Teruhisa Akashi, Kenji Nakashima | 2019-10-08 |