Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10283383 | Planarization method and planarization apparatus | Akifumi GAWASE, Gaku Minamihaba, Hajime Eda | 2019-05-07 |
| 10195716 | Dresser, method of manufacturing dresser, and method of manufacturing semiconductor device | Takahiko Kawasaki, Akifumi GAWASE | 2019-02-05 |