Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10459355 | Template substrate and manufacturing method thereof | Masamitsu Ito | 2019-10-29 |
| 10274821 | Mask and manufacturing method of mask | Keiko Morishita | 2019-04-30 |
| 10241394 | Pattern formation method, control device, and semiconductor device manufacture method | Keiko Morishita, Hideaki Sakurai | 2019-03-26 |