Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10312113 | Flow passage structure, intake and exhaust member, and processing apparatus | Takahiro Terada, Masayuki Tanaka | 2019-06-04 |
| 10220394 | Nozzle device and processing apparatus | Masayuki Tanaka, Takahiro Terada, Yusuke Suzuki | 2019-03-05 |