Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10407542 | Resist material and pattern forming method using same | Kei Kobayashi | 2019-09-10 |
| 10395899 | Method of manufacturing semiconductor device and semiconductor manufacturing apparatus | Ryuichi Saito, Ryosuke Yamamoto | 2019-08-27 |
| 10366886 | Pattern forming method, self-organization material, and method of manufacturing semiconductor apparatus | Masahiro Kanno, Yusuke Kasahara | 2019-07-30 |