Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10304704 | Substrate processing method and substrate processing apparatus | Katsuhiro Sato, Yoshihiro Ogawa | 2019-05-28 |
| 10192733 | Method of manufacturing semiconductor device and chemical liquid | Katsuhiro Sato, Masaaki Hirakawa | 2019-01-29 |