Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10262866 | Indium phosphide smoothing and chemical mechanical planarization processes | Henry A. Beveridge, Tatsuyoshi Kawamoto, Mahadevaiyer Krishnan, Dinesh Kumar Penigalapati, Rachel S. Steiner +2 more | 2019-04-16 |