Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10480063 | Capacitive coupled plasma source for sputtering and resputtering | Roman Chistyakov | 2019-11-19 |
| 10227691 | Magnetically enhanced low temperature-high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond like films | Roman Chistyakov | 2019-03-12 |
| 10227692 | Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films | Roman Chistyakov | 2019-03-12 |