Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10229842 | Double sided buff module for post CMP cleaning | Clinton SAKATA, Hui Chen, Jim K. Atkinson, Brian J. Brown | 2019-03-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10229842 | Double sided buff module for post CMP cleaning | Clinton SAKATA, Hui Chen, Jim K. Atkinson, Brian J. Brown | 2019-03-12 |