Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10338005 | Apparatus for inspecting back surface of epitaxial wafer and method of inspecting back surface of epitaxial wafer using the same | Tatsuya OSADA, Masahiko Egashira | 2019-07-02 |