Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497542 | Flow control showerhead with integrated flow restrictors for improved gas delivery to a semiconductor process | Patti J. Mudd | 2019-12-03 |
| 10303189 | Flow control system, method, and apparatus | Marshall B. Grill, Norman L. Batchelor, II | 2019-05-28 |