Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10379438 | Configuring optical layers in imprint lithography processes | Vikramjit Singh, Michael Nevin Miller, Frank Y. Xu | 2019-08-13 |
| 10317806 | Substrate loading in microlithography | Roy Matthew Patterson, Matthew S. Shafran, Charles Scott Carden, Satish Sadam, Ryan Christiansen | 2019-06-11 |