BV

Bo H. Vanderberg

AT Axcelis Technologies: 1 patents #3 of 19Top 20%
🗺 Massachusetts: #5,264 of 14,267 inventorsTop 40%
Overall (2019): #526,654 of 560,194Top 95%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10483086 Beam profiling speed enhancement for scanned beam implanters Andy Ray, Edward C. Eisner 2019-11-19