Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10409155 | Method and apparatus for neutral beam processing based on gas cluster ion beam technology | Sean R. Kirkpatrick | 2019-09-10 |
| 10202684 | Method for neutral beam processing based on gas cluster ion beam technology and articles produced thereby | Sean R. Kirkpatrick, Michael J. Walsh | 2019-02-12 |
| 10181402 | Method and apparatus for neutral beam processing based on gas cluster ion beam technology and articles produced thereby | Sean R. Kirkpatrick, Michael J. Walsh, Richard C. Svrluga | 2019-01-15 |