Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468290 | Wafer chuck apparatus with micro-channel regions | Raymond Ellis | 2019-11-05 |
| 10269662 | Scanning methods for focus control for lithographic processing of reconstituted wafers | Paul M. Bischoff, Emily True, Raymond Ellis | 2019-04-23 |