Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10217646 | Transition metal dry etch by atomic layer removal of oxide layers for device fabrication | Patricio E. Romero | 2019-02-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10217646 | Transition metal dry etch by atomic layer removal of oxide layers for device fabrication | Patricio E. Romero | 2019-02-26 |