Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10516943 | Microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device | Manuel Dorfmeister, Michael Schneider, Manfred Kaltenbacher, Alfons Dehe, Thomas Grille +1 more | 2019-12-24 |
| 10461203 | Semiconductor devices, a fluid sensor and a method for forming a semiconductor device | Stefan Clara, Thomas Grille, Peter Irsigler, Bernhard Jakoby, Ventsislav Lavchiev +2 more | 2019-10-29 |
| 10345227 | Sensing systems and methods using a coupling structure | Ventsislav Lavchiev, Thomas Grille, Bernhard Jakoby | 2019-07-09 |
| 10247671 | Photonic crystal sensor structure and a method for manufacturing the same | Jonathan Silvano de Sousa, Thomas Grille, Thomas Neidhart, Peter Irsigler, Vijaye Kumar Rajaraman | 2019-04-02 |
| 10217644 | Production of adhesion structures in dielectric layers using photoprocess technology and devices incorporating adhesion structures | Thomas Grille, Joern Plagmann, Helmut Schoenherr, Ralph Muth | 2019-02-26 |