Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10373855 | Method for processing a wafer and method for processing a carrier | — | 2019-08-06 |
| 10246782 | Methods for etching a workpiece, an apparatus configured to etch a workpiece, and a non-transitory computer readable medium | Sonja Muringer | 2019-04-02 |