Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468248 | Method for producing a self-aligning masking layer | Heiko Aßmann, Felix Braun, Marcus Dankelmann, Stefan Doering, Karsten Friedrich +3 more | 2019-11-05 |
| 10241391 | Method for processing a carrier, a carrier, an electronic device and a lithographic mask | Henning Feick, Marcel Heller, Dieter Kaiser | 2019-03-26 |