Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10384934 | MEMS device and method of manufacturing a MEMS device | Alfons Dehe, Stephan Pindl, Carsten Ahrens | 2019-08-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10384934 | MEMS device and method of manufacturing a MEMS device | Alfons Dehe, Stephan Pindl, Carsten Ahrens | 2019-08-20 |