Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10458019 | Film deposition apparatus having a peripheral spiral gas curtain | Ching-Chiun Wang, Chih-Yung Huang, Kung-Liang Lin, Chen-Der Tsai, Chien-Chih Chen | 2019-10-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10458019 | Film deposition apparatus having a peripheral spiral gas curtain | Ching-Chiun Wang, Chih-Yung Huang, Kung-Liang Lin, Chen-Der Tsai, Chien-Chih Chen | 2019-10-29 |