Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10276439 | Rapid oxide etch for manufacturing through dielectric via structures | Sebastian U. Engelmann, Li-Wen Hung, Eric A. Joseph, Eugene J. O'Sullivan, Cornelia Tsang Yang | 2019-04-30 |