Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10458014 | Thin-film deposition methods with thermal management of evaporation sources | Markus Beck | 2019-10-29 |
| 10174417 | Thin-film deposition methods with fluid-assisted thermal management of evaporation sources | Markus Beck, Robert G. Wendt | 2019-01-08 |