Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10509335 | Cover member, conveying apparatus, lithography apparatus, and method of manufacturing article | Shigeo Koya | 2019-12-17 |
| 10185233 | Cover member, conveying apparatus, lithography apparatus, and method of manufacturing article | Shigeo Koya | 2019-01-22 |