Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10411271 | Separator supporting structure | Shuhei Goto | 2019-09-10 |
| 10287680 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Shintaro Kogura, Ryota Sasajima | 2019-05-14 |
| 10168520 | Microscope system and microscopy method | Hisao Kitagawa, Yoshihiro Shimada | 2019-01-01 |